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DJPS

Diyala Journal For Pure Science

Scientific Refereed Journal Published By College of Science - University of Diyala

 

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djps.15.01.400D

Diyala Journal For Pure Sciences DJPS

ISRA Impact Factor:3.715

P- ISSN:2222-8373, E-ISSN:2518-9255

Volume 15, Issue 1 , January . 2019

 

 

 

Electrical Discharge Characterization of Planar Sputtering System for Gold Target

 

  Mohammed Khammass Khalaf, Mohammed Jwair Dathan, Saadi Khalaf Faihan, Dawood Salman Ali

 

Year: 2019, Volume: 15, Issue: 1

 

Pages:  1-8 , DOI: http://dx.doi.org/10.24237/djps.15.01.400D 

 

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Abstract


 

Before using any sputtering system, the extent of the operating pressures and voltages must be known by studying the breakdown curve with the product of the working pressure times the inter electrode distance. In this paper, argon breakdown by dc electrical potentials was experimentally studied. Paschen curves for argon gas were obtained by measuring the breakdown voltage of argon using gold target. These curves display that the breakdown voltage in Ar gas between two planer electrodes comparable with (P. d). The I-V characteristics of the plasma discharge point to that the discharge is working in the abnormal glow region.

 

Keywords: Dc discharge plasma, Gold target, Argon, Sputtering.

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